Abstract
"Thin films deposition kinetics of BaXSr1-XTiO3 (BST)/nichrome is modeled by the stoichiometric rate of a perovskite-type material such as ABO3, where cations A, B, and the anion oxygen should ideally have a 1:1:3 rate, respectively. The experimental stoichiometry data measured by EDS on films of 240 nm, and the Ba/Sr, (Ba+Sr)/Ti rates considered in percentages starting from arithmetic and the sigmoidal relationship between Ba and Sr. They show relationships in sigmoidal, exponential, and parabolic mathematical functions that together describe the BST thin films deposition kinetics by means of RFMagnetron Co-Sputtering (RFMCS). The proposed mathematical model is fundamental to optimize, explain and use the deposition process working conditions, such as the working pressure, the Ar/O2 rate in percentage, and sccm. The controlled applied power on each BaTiO3 (BTO) and SrTiO3 (STO) targets achieve more accurate stoichiometry in thin films deposition for solid solutions on quaternary materials."
Highlights
Recent research has shown that in the BST thin films deposition process by means of RFMagnetron Co-Sputtering (RFMCS) when complementary and simultaneous applied powers used in two magnetrons, Ba and Sr are depositions on the substrate following a mathematical sigmoidal form
According to the experimental mathematical model, the straight dashes indicate the limits or lines with zero slope where the BST elements should converge for the sum of Ba+Sr, Ti, and oxygen, respectively, to obtain the BST100
As can be seen, Sr has a better control in the deposition for all Applied Power Combinations (APC) than the Ba
Summary
Recent research has shown that in the BST thin films deposition process by means of RFMCS when complementary and simultaneous applied powers used in two magnetrons, Ba and Sr are depositions on the substrate following a mathematical sigmoidal form. The concentration follows a sigmoidal S-profile equation as a function of the complementary applied power on nonstoichiometric targets of BaTiO3 (BTO) and SrTiO3 (STO) [1,2,3]. This sigmodal mathematical model and the fit with experimental data measured by EDS and XRD has been used to explain the chemical structure and some properties such as: the gap energy, the deposition rate, the crystal size, and the resistivity of the BST on quartz substrates for different temperatures. RF-Magnetron Co-Sputtering (RFMCS) Nichrome In situ 495°C Off-axis 30°C 8 cm
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