Abstract
As the design of microsystems (MST) or microelectromechanical systems (MEMS) matures and migrates from process centric to performance-based design, MEMS designers would need a rational method for selecting an appropriate material that is not based on the ease of processing alone. While there is a growing number of thin film materials that can be used for MEMS devices, the selection of a particular material is rarely based on quantifiable criterion that relates directly to the optimum performance of the device. This article describes the need of materials selection for MEMS from a designer׳s point of view. The performance indices and the selection of most appropriate material for MEMS is also described. From MEMS structures to Ashby׳s material selection method is reviewed and presented in following sections. Effects of length scale is documented as described by followed by mechanical behavior and properties of materials is further documented. Influence of materials on the performance of micro- systems is described in next section followed by common issues in microsystem designing. Further, comparison of common materials is described with the help of two years studies of MEMS structures. Ashby׳s materials selection process is also described for thin films followed by summary of this article.
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