Abstract
In this study, we correlate various processing conditions with the magnetic properties of CoCrTa/Cr films by varying the substrate preheating, the substrate bias, and the composition of the magnetic target. High Hc CoCrTa/Cr films with thin Cr underlayers were produced by either preheating the substrate or by rf bias sputtering. We found that the sputtering temperature of the magnetic layer plays a far more important role in reducing intergranular exchange coupling and increasing Hc than does the CoCrTa/Cr crystallographic texture. The optimum condition for preparing high Hc films depends on the magnetic target composition. Even though the crystallographic texture does not control Hc, it does have an effect on the ΔM curve which is related to the noise properties of CoCrTa/Cr media. ΔM measurements indicate that {11̄01}Co /{110}Cr textured films may have slightly better noise properties than the films with {112̄0}Co /{200}Cr texture with similar Hc.
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