Abstract
In this chapter we discuss various methods for the synthesis of transition metal oxides (TMOs) and their characterization by different methods targeting their gas sensing application. Amongst the various growth methods used, we deal with pulse laser deposition, sputtering, aqueous chemical growth and spray pyrolysis in more details. The more widely used fundamental structural and surface characterization techniques like X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and atomic force microscopy are outlined. It is elaborated that nanostructures and nanostructured surfaces are highly controlled by the deposition parameters, which, subsequently control the transport properties, and the films sensing characteristics.
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