Abstract

In this study, ZnO nanorods (NRs) are grown on the ZnO seed layer incorporating carbon nanotubes (CNTs). Field emission scanning electron microscope (FESEM) and transmission electron microscope (TEM) images show that CNTs are well distributed in the seed layer. X-ray photoelectron spectra (XPS) reveal the enhancement of oxygen defect-related chemical bindings and photoluminescence (PL) spectra show the increase of defect-related PL intensity. The enhanced oxygen defects for ZnO NRs on CNT-incorporated seed layer improve the electron concentration and the conductivity after light/gas sensing; as a result, the light/gas dual-sensing behaviors for CNT-incorporated ZnO NRs sensor are boosted. Owing to steady response, simple fabrication, and compact size, light/gas dual-sensing chips with ZnO NRs on CNT-incorporated seed layer are promising for ultraviolet (UV) light and gas detection.

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