Abstract
A large number of gas-sensitive materials like semiconducting metal oxides operate only at elevated temperatures. A new type of low-power microheater module based on new materials (such as diamond-like carbon or silicon carbide) is investigated. Simulation methods (finite-element method, FEM) are used to compare different types of concepts for low-power microheater modules. The thermal behaviour of membranes with different material combinations and the mechanical stress induced into a thin membrane at elevated temperatures are analysed by simulation. The advantage of using new materials like diamond, diamond-like carbon or silicon carbide films in these fields will be demonstrated and a proposal for realization is given. The benefit of extensive simulation studies in the approach is to minimize the costs for development, especially in sensitive fields of research and development.
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