Abstract
Mass spectroscopic studies of the neutral particles sputtered by Ar +ions at energies around 1 keV from polycrystalline targets of 11 different metals have been performed, using a hf plasma maintained in pure argon at some 10 −4 Torr by electron cyclotron wave resonance as an ionizing medium as well as an effective ion source. Besides sputtered atoms Me 1 and molecules Me 2 with intensity ratios R 21 between Me 2 and Me 1 in the order of 10 −2 to 10 −1, neutral triatomic complexes Me 3 with corresponding ratios R 31 of some 10 −4 are found. Possible applications of the experimental method for surface analysis are discussed for previously air exposed polycrystalline Ta and Nb surfaces.
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