Abstract
The potential of ion sputtering based mass spectrometry applied to materials characterization on the nanometer scale is discussed. Analytical approaches and required instrumental capabilities are outlined, and the current state-of-the-art is summarized. A new generation of analytical instruments specifically optimized for laser post-ionization secondary neutral mass spectrometry has been developed at Argonne National Laboratory (ANL). Experimentally verified (or anticipated after near-future upgrades) analytical capabilities of these instruments, capable of quantitative analysis at the nanometer-scale, are reported and compared to secondary ion mass spectrometry.
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