Abstract
AbstractThe plasmochemistry of methylphenylsilane diluted with hydrogen in radio frequency discharges during the deposition of thin films of plasmatic polysilane is investigated. The plasma reaction system has been examined under conditions identified from previous studies to give the best material. Mass spectrometry is used to follow the monomer fragmentation and to directly (on‐line) analyze the plasma composition under the static and dynamic regimes. The effect of input power is described. The products of the plasma‐induced reactions are collected in a cryogenic trap and then separated and analyzed by gas chromatography with a mass spectrometry analyzer. Organosilicon precursors for the plasma polymerization of one‐dimensional polysilanes are identified together with prevailing reaction pathways in the plasma. A simple method of monomer conversion efficiency is introduced.magnified image
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