Abstract
The mass spectra of PH 3, AsH 3 and TMG in H 2 are presented. Measurement of PH 3 and AsH 3 pulse sequences in H 2 and N 2 as a carrier gas in an MOVPE system are reported. The studies are carried out with total gas flows in the range of 3–9 1/min, at atmospheric pressure and low pressure down to 25 mbar. Several gas sampling positions in the reactor are investigated. An effective increase of pulse spectra resolution is obtained using low pressure. Pulse sequences are varied between 2 s pulse duration /30 s pauses and 0.5 s pulse duration /0.5 s pauses. The normalized pulse half-width is independent of the sampling position. Using N 2 as a carrier gas, pulse echos can appear.
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