Abstract
Comparing mass with other chemical analysis or instrumental analysis, it has the characteristics that enables to analyze almost all elements at the same time and very sensitively.Hereunder we describe about the developing history of r.f. spark source mass spectrography of solids which is used usually for analysis of impurities in iron and steel and also describe about ionization method, optical principle of ion focusing system, ion detecting method by photoplate etc.We explain, showing examples, about quantitative method calculating element concentration from exposure ratio of the same intensity measuring density by micro photometer and the qualitative analyzing method of composition element from mass spectrum.
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