Mass spectrometric analysis of a N 2/H 2 microwave discharge plasma

Abstract

Using Li +-ion attachment mass spectrometry, we studied the products of microwave discharges through N 2/H 2 in a flowing gas system at a pressure of 840 Pa (6.3 Torr) and a total flow rate of 6 mL/min. The discharges produced various neutral and ionic species in amounts that depended upon the experimental arrangement and the discharge parameters. Ionic products were N +, N 2 +, N 2H +, N 2H 2 +, NH 3 +, and (NH 3) n H + ( n=1–3). In addition to NH 3 as a major neutral product, we observed a significant peak at m/ z 65 and tentatively assigned it to the Li +-ion adduct species N 4H 2Li +. This interesting product species has not been reported before.