Abstract
A single focusing mass spectrometer system has been built to study sputtering of surfaces by ion bombardment. Bombarding ions are formed in an oscillating electron source. Sputtered ions are mass analyzed directly. Sputtered neutrals are ionized and detected using a pulsed source-detector system which allows the measurement of the ionized sputtered neutral beam intensities to be made even in the presence of much larger signals from the residual gases in the instrument.
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