Mass Spectra Stimulated by O+ and Ar+ Interacting with a Surface

Abstract

Beams of O(+) and Ar(+) in the energy range from 100 to 300 eV were directed into an aperture in one face of a copper box. The mass spectrum from a similar aperture in an adjacent face was observed with the aid of a commercial RF quadrupole spectrometer. On the basis of the results obtained it is reported that O(+) beams at about 200 eV may be essentially lost after a few collisions with a surface, in agreement with similar conclusions about atomic oxygen at thermal energies.