Abstract
Sensors using monolithically integrated acoustic and electronic components assembled on the same substrate require special arrangements for the temperature stabilization of the oscillator frequencies. We discuss the temperature stabilization and mass sensitivity of Rayleigh waves on {100} GaAs crystals cut in the <100 > propagation direction. The temperature compensation is investigated for a GaAs/SiO 2/Au layered structure. Additionally, a mass-sensitive organic layer is considered. We show that a temperature-compensated mass-sensitive device can be realized. The temperature coefficient of delay (TCD) and the temperature coefficient of frequency (TCF) are calculated. Better temperature compensation than for ST- X quartz can be achieved.
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