Abstract
In this paper, the concept of electrical effective permittivity function is used to calculate the eigen-frequencies and the particle displacements of a piezoelectric Acoustic Plate Mode (APM). These results allow one to determine the mass sensitivities of the first order vibration modes used in a first order perturbation theory. Theoretical results are then discussed and compared to those of the Wang method in the case of a Shear Horizontal-APM sensor on ST cut quartz substrate. Experimental measurements by means of a copper electrodeposition are carried out and show that the perturbation method leads to a better understanding of the APM behavior.
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