Abstract

The emission charge state dependence of alkali metal ions back-scattered in binary collisions has been evaluated. For this purpose, mass-resolved LEIS in an SIMS instrument was utilized during bombardment of 133 Cs + or 39 K + on metal surfaces (Ta, Au or Cu) under dynamic sputtering conditions. Back-scattered singly positively charged alkali ions were found to be by far predominant (i.e. with an at least a factor of 1000 larger flux than other ejected alkali ions). Back-scattered negative alkali ions ( 133 Cs − , 39 K − ) as well as doubly positively charged alkali ions ( 133 Cs ++ , 39 K ++ ) were also observed, while other emission charge states (such as triply positively charged alkali ions) could not be detected.

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