Abstract
A fundamental limitation to the depth resolution of sputter depth profiling in near surface analysis is ion-impact-induced atomic mixing. The quantitative predictions of a recent theoretical model of atomic mixing during ion impact are compared with experimental in-depth secondary ion profiles of originally abrupt mass distributions. A numerical method is presented which accurately accounts for the redistribution of material under conditions of a depth dependent “diffusion-like” transport and surface erosion.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
