Abstract
The high-quality and controllable preparation of molybdenum nitrides (MoxNy) will significantly advance the fields of heterogeneous catalysis, energy storage, and superconductivity. However, the complex structure of MoxNy, which contains multiple phases, makes exploring the structure-property relationship challenging. The selective preparation of MoxNy with distinct phases is undoubtedly an effective method for addressing this issue, but it is lacking experimental cases and theoretical reports. Here we demonstrate a feasible chemical vapor deposition (CVD) strategy for selectively producing γ-Mo2N or δ-MoN through modulating the mass quantity of N precursors. A liquid Cu-Mo alloy was used as a Mo precursor and catalyst in this system. The resulting γ-Mo2N was systematically characterized and found to be of high quality. Furthermore, the morphology evolutions of γ-Mo2N and δ-MoN with growth time were summarized in detail, as a result of growth and etching dynamics. This work promotes the phase modulation of MoxNy and provides a framework for future research on the structure-property relationship.
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