Mass flow rate and pressure distribution of gas through three-dimensional micro-channels

Abstract

An effective method to predict the mass flow rate and pressure distribution of gas through three dimensional micro-channels with different cross-section shapes has been proposed. For rectangular cross sections often employed in experiment, the present solutions versus measured data of Zohar et al. (2002) show that the side walls significantly affect the mass flow rates as the aspect ratio is smaller than 10, whereas the non-dimensional pressure distributions, mainly determined by the inlet-to-outlet pressure ratio, are insensitive to the aspect ratio.