Mass effects on angular distribution of sputtered atoms

Abstract

Sputtering metal targets at low ion energies (Hg or Ar at <300 eV) under normal ion incidence causes the lighter atoms (lighter isotopes or lighter elements of alloys) to be preferentially ejected in a direction normal to the target surface. Experimental results are shown for several elements and alloys at various bombardment energies. The amount of enrichment of the lighter species normal to the target surface decreases quite rapidly with increasing ion energy. The phenomenon is a result of reflective collisions because lighter atoms can be backscattered from heavier ones underneath but not vice versa. The effect provides an explanation why solar-wind-exposed lunar material is enriched in the heavier isotopes since sputtered lower-mass elements have a higher chance of achieving the lunar escape velocity.