Abstract
Mass and energy distribution of positively and negatively charged small GaxAsy cluster ions consisting of up to six atoms sputtered from a GaAs(100) surface after 150keV Ar+ ion bombardment are reported. Positively charged ions contain a larger fraction of Ga atoms while negatively charged ions are rich in As. Measured energy distributions display a maximum at low kinetic energies of a few eV followed by a steep decrease with increasing energy which is more pronounced for larger ions.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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