Abstract
A simple and efficient technique for large-area manufacturing of concave microlens arrays (MLAs) on silica glasses with femtosecond (fs)-laser-enhanced chemical wet etching is demonstrated. By means of fs laser in situ irradiations followed by the hydrofluoric acid etching process, large area close-packed rectangular and hexagonal concave MLAs with diameters less than a hundred of micrometers are fabricated within a few hours. The fabricated MLAs exhibit excellent surface quality and uniformity. In contrast to the classic thermal reflow process, the presented technique is a maskless process and allows the flexible control of the size, shape and the packing pattern of the MLAs by adjusting the parameters such as the pulse energy, the number of shots and etching time.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
