Abstract

Endowed with nanoscale spatial resolution, contact resonance atomic force microscopy(CR-AFM) provides extremely localized elastic property measurements. We advance herethe applicability of CR-AFM on surfaces with nanosize features by considering thetopography contribution to the CR-AFM signal. On nanosize granular Au films,the elastic modulus at the grain scale has been mapped out by considering aself-consistent deconvolution of the contact geometry effect in the CR-AFM image.Significant variation in the contact area over granular topography arises as the probe iseither in single- or multiple-asperity contact with the surface. Consequently, inextracting the elastic modulus from CR-AFM measurements on granular surfaces weconsidered both the normal and lateral couplings established through multiple-asperitycontacts between the tip and the surface. Thus, by appropriately considering thechange in the contact mechanics during CR-AFM imaging, variations in the elasticmodulus have been revealed in the intergrain regions as well as across individualgrains.

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