Mapping ductile-to-fragile transition and the effect of tool nose radius in diamond turning of single-crystal silicon

Marcel Henrique Militão Dib,Renato Goulart Jasinevicius,José Antonio Otoboni

doi:10.1007/s00170-021-08528-8

Abstract

Although it has long been known that tools with more negative rake angles allow the ductile regime when machining monocrystalline silicon, little has been discussed about the tool-material interaction. The microgeometric contact of the tool tip at this interface plays an essential role in the material remotion (ductile or brittle). In this paper, the tool rake angle was varied in order to change the value of the undeformed chip thickness once the tool cutting radius, formed in front of the tool rake face, changes when the tool rake angle becomes more negative. Based on the statistical design of the experiment applied to cutting tests, a map is built to relate the values of transition pressure in different crystallographic directions. This map assisted in determining the machining conditions with a ductile response into a broader spectrum based on the variation of the tool rake angle. The results obtained allowed to answer questions under which machining conditions and tool geometry account for better surface finishes, lower machining forces, and lower residual stresses. The response surfaces, from statistical design, provided answers capable of establishing under which cutting radii yielded more ductile material removal and avoided a brittle response related to the anisotropic behavior of the material. Finally, the brittle-to-ductile transition mapping determined a more suitable machining condition to diamond turn Fresnel lenses in single crystal silicon.

Highlights

Monocrystalline Silicon is an important structural and optical material [1] and is broadly used in micro/nanoelectromechanical systems [2]
The studies applied to explain the ductile response of semiconductor crystals, from the 1990s onwards [8,9,10,11,12] were based on concepts of pressure/stress-induced phase transformation initially demonstrated in the 1960s [13,14,15,16,17]
The level curves of the surface finish allowed us to determine the tool rake angle to obtain an optimum value of the surface finish

Summary

Introduction

Monocrystalline Silicon is an important structural and optical material [1] and is broadly used in micro/nanoelectromechanical systems [2] It has a typically fragile behavior at room temperature and atmospheric pressure [3]. Some of these phases are thermodynamically stable while others are metastable Among these phases, the most relevant in mechanical processes is the one that has a metallic characteristic, making silicon susceptible to plastic deformation [20, 21]. The most relevant in mechanical processes is the one that has a metallic characteristic, making silicon susceptible to plastic deformation [20, 21] This phase is achieved by changing the natural structure of silicon (diamond cubic) to a more dense, metastable structure, known as beta-tin (ß-Sn), under hydrostatic stress between 10 and 13 GPa [22]. The ß-Sn metastable phase is of great interest since when the decompression speed is rapid, this phase becomes amorphous [20, 23], and, in turn, maintains the desired physical characteristics in the induction of the ß-Sn phase by mechanical loading [21]

Methods

Results

Conclusion