Abstract
Small angle neutron scattering (SANS) analysis using ellipsoidal neutron mirrors are highly demanded for basic researches of high tensile strength steel sheets, proteins and polymer materials. Although the mirror was conventionally assembled from multilayer neutron super mirrors deposited on ground and polished glass segments, it was difficult to align segmented mirrors with high accuracy and it took several months for the grinding and polishing process. An optimized manufacturing process is proposed utilizing optical function evaluation based on measured mirror surface profile. Optical aberration caused by surface form error and misalignment is evaluated by ray-tracing using mirror surface profile measured by non-contact high precision profilometer.
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