Manufacture and Characterization of TiO<sub>2</sub> Nanowires by CVD

Abstract

Under the catalysis of Co metal, the nanosized titania could be grown on Ti substrate at elevated temperature under a gas mixture of N2, O2, CH4 , and H2O. The nanosized titania was characterized by scanning electron microscope for its morphology, and by an energy dispersion spectrometer for its composition. The results showed that the straight and long titania nanowire could be formed at 900°C under a gas mixture of N2, O2, and CH4. When H2O vapor was added to the gas mixture, the titania nanowire became somewhat curved. The tiania nanowire was oxygen deficient, i.e. TiO2-X.