Abstract

In recent years, a record small mechanical tools based on composites with shape memory effect (SME) were created [1-4]. Application of the technology of selective ion etching allowed for the creation of two-layer composite actuators and tools based on rapidly quenched nonmagnetic alloys with SME, such as Ti2NiCu [1]. These composite actuators can change their shape reversely and produce mechanical work using only “one-way” SME of the alloy [2]. Currently in the field of manipulation and manufacturing at the nanoscale, there is an urgent need to develop new functional materials in order to fill the gap between the dimensions of modern MEMS and real size of nano-objects to be manipulated. Recently the operation of nano-tweezers using layered composites based on alloy with SME driven by thermal actuation has been demonstrated [1-3]. The operation of the Ti2NiCu/Pt composite actuator driven by heating was demonstrated, with an overall volume of the actuator of less than 1 μm3 and thickness of active layer of the T2NiCu alloy being down to 70 nm [1]. These achievements of nanotechnology can be used certainly in various branches of biology. Developed technique allow to hold, move and manipulate of animate or inanimate objects of submicron and nanometer sizes, for example, carbon nanotubes, graphene sheets, bacteria, viruses, biological particles of different nature. The purpose of this paper is description of experiments on preparation of insect’s fibers of submicron sizes into a vacuum chamber of FIB.

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