Abstract
Copper and copper oxide thin films have been synthesized on (001) SrTiO3 substrates using pulsed laser deposition. Three kinds of thin films can be achieved by changing deposition temperature and laser energy density: pure Cu, Cu:Cu2O composite, and pure Cu2O thin films. A phase diagram about the compositions of thin films has been represented and explained by redox reaction at the substrate surface during the deposition process. The present work represents a novel approach to further understand the surface reaction during deposition process and to fabricate oxide thin films with variable valence states using pulsed laser deposition.
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