Magnetron with sandwich target for solid composite film deposition Mo x Cr1–x N

Abstract

In this paper, we consider a technological magnetron equipped with a sandwich target designed for the synthesis of Mo x Cr1–x N composite films with a continuous change in the stoichiometric coefficient x, which provides a smooth change in hardness. In this paper, the relationship between the stoichiometric coefficient x and the geometric factor equal to the relative total area of the slots in the external target is established. It is established that the proposed magnetron with a sandwich target makes it possible to synthesize Mo x Cr1–x N solid composite films with a continuous change in the stoichiometric coefficient x, which provides a smooth change in the hardness from 18 to 33 GPA. In this case, the stoichiometric coefficient can be controlled in the range 0 < x < 0.3, varying the area of the slots in the range 0 < α < 0.5 for the specified values of the discharge current density and nitrogen consumption.