Abstract
We compared the sputtering phenomena of liquid and solid Sn targets using a conventional magnetron sputtering apparatus. The erosion rate of liquid Sn was higher than that of solid Sn by a factor of 3 while the density of Sn atoms in the gas phase was almost the same when employing the liquid and solid targets. However, we observed the ejection of droplets from the liquid Sn target. This was a unique phenomenon in the sputtering of the liquid target, and may be a mechanism for the higher erosion rate of the liquid Sn target.
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