Abstract
The microfabrication with a magnetostrictive TbxDy(1−x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1−x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.
Highlights
Magnetostriction is a useful property of ferromagnetic materials that causes strain during the process of magnetization
The strain of the magnetostriction materials can be controlled by a magnetic field [1,2,3,4,5,6]
Magnetostriction can be quantified by the magnetostrictive coefficient which can be positive or negative and is defined as the generated strain when a magnetic field causing magnetization saturation is applied
Summary
Magnetostriction is a useful property of ferromagnetic materials that causes strain during the process of magnetization. The substrate must be heated at a temperature higher than 400 ◦C for crystallization, because the sputter-deposited Terfenol-D films are amorphous state at low temperatures, which show a low magnetostrictive performance [23,24,25]. Those sputtered films exhibit a magnetostriction coefficient approximately 1/3 (540 ppm) of the bulk value without annealing and 2/3 (920 ppm) of the bulk value with annealing at 450 ◦C [19,20,21]. Microcantilever bi-material structures are fabricated, and the magnetostriction performances are evaluated
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