Abstract
The magnetostriction and magnetic properties of sputtered Sm <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> Fe <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">100-x</sub> (3≤x≤54) thin films at room temperature were investigated. Films had an amorphous structure for x≥12. The magnetostriction λ of the films increased rapidly under weak fields (≪1 kOe) and reached maximum values in the range 130 to 160×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-6</sup> at 16 kOe for x=30 to 40, suggesting that Sm-Fe films can be used in microactuators and sensors. The magnetic properties did not show a clear dependence on the sputtering conditions, such as the input power, Ar gas pressure, or substrate temperature (≤250°C).
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