Abstract
Magnetostriction of amorphous Sm–Fe and Sm–Fe–B thin films is systematically investigated over a wide composition range from 14.1 to 71.7 at% Sm. In the case of Sm–Fe–B thin films, the amount of B is varied from 0.3 to 0.8 at%. Good magnetostrictive characteristics, particularly at low magnetic fields, are achieved in both Sm–Fe and Sm–Fe–B thin films, although better properties are observed in B containing Sm–Fe thin films. At a magnetic field of 100 Oe, for example, the magnitude of magnetostriction is −350 ppm in a Sm–Fe thin film and it is −470 ppm in a B containing Sm–Fe thin film. With their excellent magnetostrictive characteristics, the present Sm–Fe and Sm–Fe–B thin films are considered to be suitable for Si based microdevices.
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