Magnetostriction in Amorphous Co66Fe34 Microcantilevers Fabricated with Hydrogenated Amorphous Silicon

B.M Silveira,O Frazão,R Pinto,A.M Pereira,V Chu,J.P Conde,A.L Pires,J.A Silva,J.H Belo,T.D Ferreira

doi:10.1051/epjconf/202023305003

Abstract

To study the magnetostriction of Co66Fe34 thin films, amorphous silicon microcantilevers were prepared by surface micromachining, and the 136 nm-thick magnetostrictive film was deposited by electron beam physical vapor deposition and patterned on top of the microcantilever structure. The magnetostriction of the Co66Fe34 films was confirmed by measuring the deflection of the cantilevers under a varying magnetic field, reaching displacements up to 8 nm. The configuration was simulated using COMSOL software, yielding a similar deflection behavior as a function of the magnetic field, with a film with a magneto strictive coefficient of λ S ~ 55 p.p.m. The experimental configuration uses a laser and a position sensitive detector to measure the displacement, based on an optical lever configuration, and a piezoelectric stage to calibrate the system.

Highlights

Internet of things, the so-called IoT, and the Internet of Energy, the so-called IoE, are emerging in our daily lives through the development of new applications towards Smart Cities [1,2]
A proof-of-concept experiment was undertaken to demonstrate the magnetostrictive behavior of the Co66Fe34 thin films, by depositing a layer of this material over a microstructure (Fig. 2a) and b))
In the first attempt to integrate magnetostrictive films with thin-film silicon cantilevers, the magnetostrictive thin films were deposited by EBPVD using a continuous 80 min deposition

Summary

Introduction

The so-called IoT, and the Internet of Energy, the so-called IoE, are emerging in our daily lives through the development of new applications towards Smart Cities [1,2]. A significant social impact is imminent, namely by allowing the emergence of IoT ecosystems supported by open technologies and platforms [1,2] This tremendous evolution of IoT is being backed by new software, advances at a hardware level are still required. The field of magnetic sensors/actuators is one of the fields that is being boosted in this new era and, being studied for many years the combination of the magnetostrictive effect with microelectro-mechanical systems (MEMS) is still at an early stage. Numerical simulations to support the results are performed, using a finite elements method

Experimental Details

Magnetostrictive Co66Fe34 Thin Film Deposition

Fabrication of Microcantilevers with Magnetostrictive Film

Magnetostrictive Microcantilevers

Conclusions