Magnetoelastic thin films of amorphous alloys, sputtered onto silicon wafers

Abstract

Thin films of magnetoelastic alloys with chemical composition similar to ‘‘METGLAS■’’ 2605-S2 and 2605-SC have been deposited by dc magnetron sputtering onto various substrates including micromachined cantilevers of single crystal Si, with or without a polyimide precoat. The complex impedance (R+jX) of in situ pickup coils was measured vs cantilever deflection at various frequencies. Depending on the deposition conditions, many of the films had good magnetoelastic properties. M-H loops and rf permeabilities were measured; and the effects of annealing in both static and rotating magnetic fields were studied.