Abstract

Magnetoelectric resonators have been studied for the detection of small amplitude and low frequency magnetic fields via the delta-E effect, mainly in fundamental bending or bulk resonance modes. Here, we present an experimental and theoretical investigation of magnetoelectric thin-film cantilevers that can be operated in bending modes (BMs) and torsion modes (TMs) as a magnetic field sensor. A magnetoelastic macrospin model is combined with an electromechanical finite element model and a general description of the delta-E effect of all stiffness tensor components Cij is derived. Simulations confirm quantitatively that the delta-E effect of the C66 component has the promising potential of significantly increasing the magnetic sensitivity and the maximum normalized frequency change . However, the electrical excitation of TMs remains challenging and is found to significantly diminish the gain in sensitivity. Experiments reveal the dependency of the sensitivity and of TMs on the mode number, which differs fundamentally from BMs and is well explained by our model. Because the contribution of C11 to the TMs increases with the mode number, the first-order TM yields the highest magnetic sensitivity. Overall, general insights are gained for the design of high-sensitivity delta-E effect sensors, as well as for frequency tunable devices based on the delta-E effect.

Highlights

  • In recent years, thin-film magnetoelectric sensors have been studied, frequently envisioning biomedical applications in the future [1,2]

  • Delta-E effect sensors are based on magnetoelectric resonators that are electrically excited via the piezoelectric layer at or close to the resonance frequency fr

  • The study was conducted on a magnetoelectric thin-film cantilever with a soft magnetic FeCoSiB–Cr multilayer and an electrode design that enables the excitation of various resonance modes

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Summary

Introduction

Thin-film magnetoelectric sensors have been studied, frequently envisioning biomedical applications in the future [1,2]. The delta-E effect of the Young’s modulus has especially been studied thoroughly in soft magnetic amorphous materials [12,13,14,15,16,17,18]. Sensors 2021, 21, 2022 especially been studied thoroughly in soft magnetic amorphous materials [12,13,14,15,16,17,18] It was used for magnetic field sensing with magnetoelectric plate resonators [19,20,21,22] and beam fisetrlducsteunrseisn[g23w–3it2h].mSuagchnerteoseolneactorircspalraetoeprersaotneadtoinrsb[e1n9d–i2n2g] oarndbublekammosdtersucatnudressom[2e3–h3a2v]e.

Definition of the Sensitivity
Magnetic Sensitivity of Arbitrary Resonance Modes
Sensor Modelling
Electromechanical Model
Magnetoelastic Model
Implications of the Magnetic Model
Results
Resonance Frequency Simulations
Summary and Conclusions
Full Text
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