Abstract
Research and development of carbon materials and advanced composites require a health monitoring of carbon fibers. A Villari effect-based method was developed for the measurement of the mechanical strain inside the carbon fiber. A microsensor was built up directly on an 8-mum-thick carbon fiber. Deposition technologies were physical vapor deposition (PVD) and chemical vapor deposition (CVD). For patterning a coaxial spiral coil, a nanolathe implemented in a focused ion beam (FIB) system using the beam as a cutting tool in a turning process was applied. This paper describes the design, fabrication, experimental setup, and the first measurement results of the magnetoelastic microsensor.
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