Abstract

Due to the high application value in intelligent robots, tactile sensors with large sensing area and multi-dimensional sensing ability have attracted the attention of researchers in recent years. Inspired by bionics of hairs on human skin, a flexible tactile sensor based on magnetic cilia array is developed, showing extremely high sensitivity and stability. The upper layers of the sensor are multiple magnetic cilia containing magnetic particles, while the lower layer is a serpentine flexible circuit board with a magnetic sensor array. When magnetic cilia are bent under force, the magnetic sensor array can detect changes in the magnetic field, thereby the magnitude and direction of external force can be obtained. The proposed sensor has a resolution of 0.2 mN with a working range of 0-19.5 mN and can distinguish the direction of external force. The large sensing area and short response time make this sensor suitable for sliding tactile detection, and experiments show that the sensor can be also applied in object recognition with a success accuracy of 97%. In addition to the shape of objects, the sensor can identify whether there is magnetism inside objects, making it of significant value in intelligent robots and modern medicine.

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