Abstract
By introducing smart materials in micro systems technologies, novel smart microactuators and sensors are currently being developed, e.g., for mobile, wearable, and implantable MEMS (Micro-electro-mechanical-system) devices. Magnetic shape memory alloys (MSMAs) are a promising material system as they show multiple coupling effects as well as large, abrupt changes in their physical properties, e.g., of strain and magnetization, due to a first order phase transformation. For the development of MSMA microactuators, considerable efforts are undertaken to fabricate MSMA foils and films showing similar and just as strong effects compared to their bulk counterparts. Novel MEMS-compatible technologies are being developed to enable their micromachining and integration. This review gives an overview of material properties, engineering issues and fabrication technologies. Selected demonstrators are presented illustrating the wide application potential.
Highlights
Magnetic shape memory alloys (MSMAs) belong to the class of Heusler materials, which are ordered intermetallics with the generic formula X2YZ with X and Y being 3D elements and Z a groupIIIA–VA element [1]
The mechanism benefits from the combination of ferromagnetic and martensitic properties that is only present in MSMA materials
This review presents an overview of MSMA microactuators, their underlying actuation mechanisms, engineering issues and fabrication technologies
Summary
Magnetic shape memory alloys (MSMAs) belong to the class of Heusler materials, which are ordered intermetallics with the generic formula X2YZ with X and Y being 3D elements and Z a group. MSMAs undergo a first-order martensitic phase transformation, which involves a large, abrupt change in both structural and magnetic properties. Generally any change of one of the physical properties induced by an external stimulus causes characteristic changes of the other physical properties Owing to their multiferroic coupling properties, FSMAs (Ferromagnetic shape memory alloys) exhibit various modes of combined sensing and actuation capabilities [2]. One example is the effect of magnetic field-induced reorientation (MIR) of martensite, which is the underlying coupling mechanism of the magnetic shape memory (MSM) effect that was discovered in 1996 [4]. Many of the presented concepts could be adapted to other MSMA materials
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