Abstract
Cr/SmCo/Cr thin films with Sm concentration of 37.7 at.% were deposited on glass substrates by magnetron sputtering. Measurement of magnetic properties showed that the SmCo film possessed good magnetic anisotropy, a high coercivity of 3019 kA/m and low magnetic exchange coupling. Microstructure analysis showed that crystallized SmCo 5 magnetic phase, non-magnetic SmCo 2 phase and Sm 2Co 7 phase co-existed in the film. The non-magnetic SmCo 2 phase might function as isolator of SmCo grains, leading to a decrease of magnetic exchange coupling. Moreover, a Cr 2O 3 oxide layer which could protect the SmCo layer from oxidation formed at the surface of the Cr cap layer.
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