Abstract
A high-speed pulsed laser deposition method with the deposition rate of several tens of microns per 1 h enabled us to obtain isotropic Fe–Pt thick film magnets. Increase in the laser power enabled us to obtain as-deposited films with L10 ordered phase due to the heat radiation from a target, which means that a substrate heating system and a post-annealing process are not required to achieve hard magnetic properties in the process. Use of an Fe-rich target enhanced the magnetic properties, and as a result (BH)max value exceeded 100 kJ/m3 in an isotropic Fe–Pt film fabricated at the power of 3 W, which was comparable to those of isotropic Fe–Pt thick film magnets prepared by a sputtering method.
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