Abstract
Nd–Fe–B thick film magnets with the thickness of several 10 μm were prepared by using an arc-deposition method with the high vacuum of 2×10−5 Pa. Good transference for the compositions could be confirmed between a Nd–Fe–B target and a film. In addition, the highest deposition rate reached approximately 10 μm/h. The structure of as-deposited films was amorphous, therefore a pulse-annealing method was adopted as a high-speed crystallization method. The average grain diameters of crystallized films prepared under the annealing time for approximately 3.5 s were 35 nm. The values of coercivity, remanence, and (BH)max for a Nd–Fe–B thick film with a stoichiometric composition were approximately 710 kA/m, 0.75 T, and 56 kJ/m3, respectively.
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