Abstract
Nd(Fe,Ti) 12N x –αFe two-phase films were prepared by DC magnetron sputtering on Si substrate at room temperature to 650°C and subsequent nitriding at 450°C. The evolution of phases and magnetic properties after deposition, annealing and nitriding were studied. The films contained mainly ThMn 12 structure and αFe phase (around 10% by weight). The energy-product is as high as 18.2 MGOe at 300 K, 26.8 MGOe at 200 K, and 34.9 MGOe at 5 K.
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