Magnetic properties of FePt nanoparticle assemblies embedded in atomic-layer-deposited Al2O3

Abstract

Self-assembled face-centered cubic FePt nanoparticles on Si substrates were embedded into amorphous Al2O3 capping layers with various thicknesses in the range 5–20 nm using atomic layer deposition (ALD) technology. The effect of the Al2O3 layer thickness on the structure, mono-dispersibility, and magnetic properties of the FePt/Al2O3-matrix composite films was investigated. After annealing at 700 °C in a reducing atmosphere for 1 h, well-dispersed face-centered tetragonal (fct) FePt particles could be obtained for the samples with 10 nm-thick and greater Al2O3 layers. Experimental results suggest that the protection of the amorphous 10 nm-thick Al2O3 matrix can effectively inhibit grain growth and particle aggregation, and preserve the ordered domains of FePt nanoparticles during the L10 ordering transition through annealing. The 5 nm fct FePt-nanoparticles/10 nm-thick Al2O3-matrix sample shows higher coercivity of 5.9 kOe. The combination of ALD-capping layer and self-assembled FePt nanoparticles provides a potential new approach to fabricate patterned magnetic recording media with ultrahigh areal density.