Abstract
Gas cluster ion beam (GCIB) irradiation was performed on Fe7Co3 films to examine the magnetic properties. After Ar ion beam etching, the coercive force (Hc) increased from the initial value; this may have been caused by irradiation damage from high-energy Ar ions. Hc decreased after Ar-GCIB irradiation (acceleration voltage (Va): 20 kV, ion fluence (F): 1 × 1015 ions/cm2). Since GCIB is an equivalent low-energy (several eV/atom) ion beam, it shows a damage-recovery effect. When the ionization electron voltage (Ve) was reduced from 200 to 60 V, Hc was observed to further decrease. Since the fraction of multiply charged Ar-GCIB decreased with decreasing Ve, severe damage of Fe7Co3 films can be minimized by employing low Ve.
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