Abstract
Fe-N/Fe multilayer films have been deposited by an opposed-target sputtering apparatus and their magnetic properties were investigated. Coercive force, H/sub c/, of the Fe-N/Fe multilayer film takes a minimum value at a proper nitrogen content and decreases as the length of the layer period d/sub layer/ increases. This decrease in H/sub c/ is mainly due to the decrease in perpendicular magnetic anisotropy of the film. The film with a d/sub layer/ of 1480 AA has an H/sub c/ of 1.5 Oe and a saturation magnetization of 1600 emu/cm/sup 3/. Annealing at a temperature above 200 degrees C leads to the crystallization of the alpha -Fe and gamma '-Fe/sub 4/N in the film. Diffusion of the nitrogen atoms from the Fe-N layer to the Fe layer becomes significant at a temperature above 400 degrees C, and the layered structure in the film is removed by annealing at a temperature above 450 degrees C. The H/sub c/ of the film takes a value in the range from 1 to 5 Oe irrespective of d/sub layer/ and nitrogen gas flow rate if the film is annealed at a temperature above 350 degrees C.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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