Abstract

CoNiFe-based amorphous films were magnetron-sputtered to investigate their structural and magnetic properties, including annealing-induced effects and interfacial influence from additional layers of Ta and Cu. The amorphous structure was confirmed by diffraction experiments. The magnetic measurements showed a well-defined uniaxial anisotropy in plane, arising possibly from atom oblique incidence effects competing with the stray field of the magnetron. The anisotropy could be influenced by using a Ta buffer layer, though the interfacial reaction gives rise to a dead layer. A coercive force Hc of 1–2 Oe and a magnetization of 680 emu/cm3 were measured at room temperature; properties which show promise for application in magnetotunneling junction devices. Thermal analyses showed a two-stage crystallization behavior, which started at 400°C and ended at about 600°C. The Curie temperature of the amorphous phase was estimated to be about 440°C.

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