Abstract
The magnetic properties and microstructure of Pr-Fe-B thin films with addition of Fe composition were investigated. Fe was added during the deposition process of Pr-Fe-B layer on Si3N4 underlayer and glass substrate. XRD measurement indicated the appearance of Pr2Fe14B and Pr2Fe23B3 phases in the thin films. The thin films at low Fe content revealed a strong reflection of Pr2Fe23B3 phase. Magnetic measurement showed that high Fe content caused a decline of the magnetic properties of the thin films. A proper Fe content of at 75.53 at.% showed a high coercivity and the presence of magneto-crystalline anisotropy. SEM and AFM results showed the surface characteristics of the thin films. XRD and TEM results indicated the formation of Fe3Si layer at the interface of Pr-Fe-B layer/Si3N4 underlayer. The Fe3Si phase only promotes the epitaxial growth of Pr2Fe14B phase. XPS depth profile demonstrated the distribution of atoms in microstructure of the thin films.
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