Magnetic properties and microstructure of Ni–Fe nitride films by reactive sputtering

Abstract

The nickel iron nitride Ni 3Fe-N seems to have the face-centered cubic structure of A 4B type. It can be considered that the magnetic structure is decided by the relationship of the electronic orbits N-2p and Ni-3d. The thin films of Ni 3Fe-N were prepared by a reactive RF-sputtering method. It was found that the amount of the N 2 flow rate greatly affects the crystal growth.